MEMS based Devices for Drug Delivery

The book "MEMS based Devices for Drug Delivery" offers a comprehensive analysis and detailed information on the manufacturing and characterization of piezoelectrically driven, valveless micropumps, as well as the development and production of hollow microneedles for transdermal drug delivery. It addresses the complex aspects of analyzing piezoelectric micropumps, which include structural and fluid dynamic couplings in intricate geometric arrangements. By utilizing finite element simulations, a realistic multiphysical analysis is enabled, encompassing both transient and three-dimensional analyses. Additionally, the methods for producing hollow silicon microneedle arrays, successfully fabricated through isotropic etching and the Bosch process, are described. The book is a valuable resource for professionals and researchers in the fields of microsystems technology and drug delivery.