Materials & Process Integration for MEMS

English, Francis E. H. Tay, 2010
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The book "Materials & Process Integration for MEMS" offers a comprehensive analysis of the materials and processes that are crucial for the development of microelectromechanical systems (MEMS). It is aimed at researchers, academics, and engineers who are addressing the challenges and opportunities of material and process integration in MEMS devices. The authors emphasize the importance of material properties, reliability, and predictability in MEMS production to ensure sustainable and profitable product development. The book covers both established and innovative micromachining techniques necessary for the fabrication of complex MEMS structures. In particular, the processes of bulk and surface micromachining are explained in detail to provide a better understanding of the manufacturing and integration of MEMS. The content is designed to assist readers in optimizing production processes and developing new MEMS applications.

Key specifications

topic
Technology & IT
Subtopic
Mechanical engineering
Language
English
Author
Francis E. H. Tay
Year
2010
Book cover
Paperback

General information

Item number
55379515
Publisher
Springer
Category
Reference books
Release date
4.3.2025

Book properties

topic
Technology & IT
Subtopic
Mechanical engineering
Language
English
Author
Francis E. H. Tay
Year
2010
Book cover
Paperback

Voluntary climate contribution

CO₂ emissions
0.35 kg
Climate contribution
CHF 0.11

30-day right of return if unopened
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