Hybridpolymere Wellenleiter für die Evaneszent Feld Mikroskopie

Research on cellular processes is advancing, and new technologies for monitoring biological activities are becoming increasingly important. In particular, micro- and nanotechnology are opening new avenues for gaining insights into cellular processes that were previously not accessible with comparable precision. A prerequisite for the development of these techniques is the continuous miniaturization of the components used. The well-known optical fiber is no longer the smallest feasible medium for transmitting light-based signals. This work focuses on the fabrication of flush-embedded waveguide structures based on hybrid polymers, embedded in PMMA. The realization of these waveguide structures is achieved through photolithography and a reactive ion etching process. All steps of the work are included.