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Essential update on the development of new processing, packaging and assembly methodologies for microsensor devices, with new coverage on 'system on a chip' and 'laboratory on a chip'The miniaturisation
Essential update on the development of new processing, packaging and assembly methodologies for microsensor devices, with new coverage on 'system on a chip' and 'laboratory on a chip'The miniaturisation
of sensors has been made possible by advances in the technologies originating in the semiconductor industry, and the emergent field of microsensors has grown rapidly over the past ten years. This book updates the successful first edition (published in 1994) to cover the fundamental principles, developments and applications of microsensors. Two new chapters will be included and will provide coverage of both CMOS device processing technologies and smart sensors, in particular BioMEMS and the system-on-chip, lab-on-a-chip, and noise-on-a-chip. Other new sections will update the treatment of optical and magnetic sensors, MOEMS and smart sensor interfacing. Worked example.
Langue | Anglais |
Numéro d'article | 8893934 |
Éditeur | |
Catégorie | |
Date de sortie | 07.08.2020 |
Langue | Anglais |
Auteur | Florin Udrea, Julian W. Gardner |
Année | 2020 |
Nombre de pages | 384 |
Edition | 2 |
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